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THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD
Abstract： This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates. 作 者： L.P.Shi X.D.He Y.Li 作者单位： Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China 期 刊： 金属学报(英文版) ISTICEI Journal： ACTA METALLURGICA SINICA 年，卷(期)： 2004, 17(3) 分类号： Keywords： micro-layer composite material EBPVD residual gas pressure evaporation method and speed substrate temperature【THEORY DEPOSITION MODEL AND INFLUENC】相关文章：
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