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High Resolution Differential Capacitance Detection Scheme for Micro Levitated Rotor Gyroscope
A differential capacitance detection circuit aiming at detection of rotating angle in a novel levitation structure is presented. To ensure the low non-linearity and high resolution, noise analysis and non-linearity simulation are conducted. In the capacitance interface, an integral charge amplifier is adopted as a front end amplifier to reduce the parasitic capacitance caused by connecting wire. For the novel differential capacitance bridge with a coupling capacitor, the noise floor and non-linearity of the detection circuit are analyzed, and the results show that the detecting circuit is capable of realizing angle detection with high angular resolution and relative low non-linearity.With a specially designed printed circuit board, the circuit is simulated by PSpice. The practical experiment shows that the detection board can achieve angular resolution as high as 0.04° with a non-linearity error 2.3%.
作 者： Huang Xiaogang Chen Wenyuan Liu Wu Zhang Weiping Wu Xiaosheng 作者单位： Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China 刊 名： 中国航空学报(英文版) ISTIC 英文刊名： CHINESE JOURNAL OF AERONAUTICS 年，卷(期)： 2007 20(6) 分类号： V2 关键词： MEMS micro gyroscope capacitance sensing inertial sensor angle detection【High Resolution Differential Capacit】相关文章：
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